Invention Grant
- Patent Title: Dicing method for separating wafers comprising a plurality of solar cell stacks
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Application No.: US17007676Application Date: 2020-08-31
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Publication No.: US11380814B2Publication Date: 2022-07-05
- Inventor: Steffen Sommer , Wolfgang Koestler , Alexander Frey
- Applicant: AZUR SPACE Solar Power GmbH
- Applicant Address: DE Heilbronn
- Assignee: AZUR SPACE Solar Power GmbH
- Current Assignee: AZUR SPACE Solar Power GmbH
- Current Assignee Address: DE Heilbronn
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: DE102019006095.4 20190829
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0475 ; H01L21/78 ; B23K26/364 ; H01L31/0687 ; B23K101/40 ; B23K103/00

Abstract:
A dicing method for separating a wafer comprising a plurality of solar cells stack along at least one parting line, at least having the steps of: providing the wafer with a top, a bottom, an adhesive layer which is integrally bonded with the top and a cover glass layer which is integrally bonded with the adhesive layer, wherein the wafer includes a plurality of solar cell stacks, each having a germanium substrate layer forming the bottom of the wafer, a germanium sub-cell and at least two III-V sub-cells; creating a separating trench along the parting line by means of laser ablation, which extends from a bottom of the wafer through the wafer and the adhesive layer at least up to a top of the cover glass layer; and dividing the cover glass layer along the separating trench.
Public/Granted literature
- US20210066533A1 DICING METHOD FOR SEPARATING WAFERS COMPRISING A PLURALITY OF SOLAR CELL STACKS Public/Granted day:2021-03-04
Information query
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