Invention Grant
- Patent Title: Shielded gate trench MOSFET integrated with super barrier rectifier having short channel
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Application No.: US16869659Application Date: 2020-05-08
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Publication No.: US11380787B2Publication Date: 2022-07-05
- Inventor: Fu-Yuan Hsieh
- Applicant: Nami MOS CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: Nami MOS CO., LTD.
- Current Assignee: Nami MOS CO., LTD.
- Current Assignee Address: TW New Taipei
- Agency: Bacon & Thomas, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/10 ; H01L29/40

Abstract:
An integrated circuit comprising an SGT MOSFET and a short channel SBR is disclosed. The SBR horizontally disposed in different areas to the SGT MOSFET on single chip creates a low potential barrier for majority carrier in MOS channel for switching loss reduction. Only one additional mask is required for integration of the short channel SBR having thinner gate oxide than the SGT MOSFET. Moreover, in some preferred embodiment, an MSO structure is applied to the shielded gate structure to further reduce the on-resistance.
Public/Granted literature
- US20210351289A1 SHIELDED GATE TRENCH MOSFET INTEGRATED WITH SUPER BARRIER RECTIFIER HAVING SHORT CHANNEL Public/Granted day:2021-11-11
Information query
IPC分类: