Invention Grant
- Patent Title: Semiconductor memory device, method of manufacturing the same, and electronic device including the semiconductor memory device
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Application No.: US16626793Application Date: 2018-09-21
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Publication No.: US11380689B2Publication Date: 2022-07-05
- Inventor: Huilong Zhu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: CN201810992854.0 20180828
- International Application: PCT/CN2018/107038 WO 20180921
- International Announcement: WO2020/042255 WO 20200305
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C11/408 ; G11C11/4097 ; H01L29/423

Abstract:
A semiconductor memory device, a method of manufacturing the same, and an electronic device including the semiconductor memory device are disclosed. According to an embodiment, the semiconductor memory device may include a substrate; an array of memory cells provided on the substrate, wherein the memory cells are arranged in rows and columns, each of the memory cells comprises a pillar-shaped active region extending vertically, wherein the pillar-shaped active region comprises source/drain regions at upper and lower ends respectively and a channel region between the source/drain regions; and a plurality of bit lines formed on the substrate, wherein each of the bit lines is located below a corresponding one of the columns of memory cells and is electrically connected to the source/drain regions at lower ends of the respective memory cells in the corresponding column, wherein each of the memory cells further comprises a gate stack formed around a periphery of a corresponding channel region, and a respective one of the rows of memory cells has gate conductor layers included in the gate stacks of the respective memory cells in the row extending continuously in a direction of the row to form a corresponding one of word lines.
Public/Granted literature
Information query
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