Invention Grant
- Patent Title: Method for transferring a thin layer using a filled preceramic polymer
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Application No.: US17078488Application Date: 2020-10-23
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Publication No.: US11380577B2Publication Date: 2022-07-05
- Inventor: Lamine Benaissa , Marilyne Roumaine
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR1912056 20191028
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L23/00

Abstract:
A method for transferring, from a donor substrate to a carrier substrate, a thin layer having a first coefficient of thermal expansion. This method comprises: —forming an embrittlement plane in the donor substrate; —forming an electrically insulating layer on the surface of the donor substrate and/or of the carrier substrate; —producing an assembly by placing the donor substrate and the carrier substrate in contact with one another via the insulating layer; —separating the assembly by fracturing along the embrittlement plane. In order to form the electrically insulating layer, the method comprises coating the donor substrate and/or the carrier substrate with a coating formulation including a composite material formed by a matrix made of a particle-filled preceramic polymer, the composite material having a second coefficient of thermal expansion, the second coefficient of thermal expansion differing from the first coefficient of thermal expansion by no more than 20% of the first coefficient of thermal expansion.
Public/Granted literature
- US20210125857A1 METHOD FOR TRANSFERRING A THIN LAYER USING A FILLED PRECERAMIC POLYMER Public/Granted day:2021-04-29
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