Invention Grant
- Patent Title: Nitride crystal substrate and method for manufacturing the same
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Application No.: US16435628Application Date: 2019-06-10
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Publication No.: US11377756B2Publication Date: 2022-07-05
- Inventor: Fumimasa Horikiri
- Applicant: SCIOCS COMPANY LIMITED , SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Ibaraki; JP Tokyo
- Assignee: SCIOCS COMPANY LIMITED,SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SCIOCS COMPANY LIMITED,SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Ibaraki; JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2018-112844 20180613
- Main IPC: C01B21/06
- IPC: C01B21/06 ; C30B29/40 ; H01L21/02 ; G01N21/95 ; G01N21/84 ; C30B25/02

Abstract:
There is provided a nitride crystal substrate constituted by group-III nitride crystal, containing n-type impurities, with an absorption coefficient α being approximately expressed by equation (1) by a least squares method in a wavelength range of at least 1 μm or more and 3.3 μm or less. α=NeKλa (1) (where 1.5×10−19≤K≤6.0×10−19, a=3), here, a wavelength is λ (μm), an absorption coefficient of the nitride crystal substrate at 27° C. is α (cm−1), a carrier concentration in the nitride crystal substrate is Ne (cm−3), and K and a are constants, wherein an error of an actually measured absorption coefficient with respect to the absorption coefficient α obtained from equation (1) at a wavelength of 2 μm is within ±0.1α, and in a reflection spectrum measured by irradiating the nitride crystal substrate with infrared light, there is no peak with a peak top within a wavenumber range of 1,200 cm−1 or more and 1,500 cm−1 or less.
Public/Granted literature
- US20190382920A1 NITRIDE CRYSTAL SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-12-19
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