Invention Grant
- Patent Title: Oxide semiconductor thin-film transistor and method of fabricating the same
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Application No.: US16759562Application Date: 2018-10-29
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Publication No.: US11296232B2Publication Date: 2022-04-05
- Inventor: Jin Jang , Suhui Lee
- Applicant: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- Applicant Address: KR Yongin-si
- Assignee: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- Current Assignee: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- Current Assignee Address: KR Yongin-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2017-0141182 20171027
- International Application: PCT/KR2018/012903 WO 20181029
- International Announcement: WO2019/083338 WO 20190502
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L29/00 ; H01L29/786 ; H01L27/32 ; H01L29/66

Abstract:
An oxide thin-film transistor includes a substrate; a first gate electrode formed on the substrate; a gate insulator formed on the first gate electrode; an oxide semiconductor layer formed on the gate insulator to correspond to the first gate electrode; source/drain electrodes formed to be spaced from each other on the oxide semiconductor layer and formed in a shape of a plurality of island patterns; a passivation layer formed on the source/drain electrodes, where the source/drain electrodes include a first area formed in a direction of the first gate electrode with respect to a horizontal plane of the substrate; and a second area formed in an opposite direction to the first area, and the plurality of island patterns are formed such that the first areas are separated from each other and thus have resistance to external stress.
Public/Granted literature
- US20200287049A1 OXIDE SEMICONDUCTOR THIN-FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2020-09-10
Information query
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