Invention Grant
- Patent Title: Transistor having wrap-around source/drain contacts and under-contact spacers
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Application No.: US16654167Application Date: 2019-10-16
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Publication No.: US11296226B2Publication Date: 2022-04-05
- Inventor: Yi Song , Praveen Joseph , Andrew Greene , Kangguo Cheng
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Erik Johnson
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/08 ; H01L29/10 ; H01L21/8238 ; H01L27/092

Abstract:
Embodiments of the invention are directed to a method of forming a semiconductor device. In a non-limiting example, the method includes forming a first channel region over a substrate, forming a second channel region over the first channel region, and forming a merged source or drain (S/D) region over the substrate and adjacent to the first channel region and the second channel region. The merged S/D region is communicatively coupled to the first channel region and the second channel region. A wrap-around S/D contact is formed such that it is on a top surface, sidewalls, and a bottom surface of the merged S/D region.
Public/Granted literature
- US20210119031A1 TRANSISTOR HAVING WRAP-AROUND SOURCE/DRAIN CONTACTS AND UNDER-CONTACT SPACERS Public/Granted day:2021-04-22
Information query
IPC分类: