Invention Grant
- Patent Title: Semiconductor device with porous decoupling feature
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Application No.: US16885825Application Date: 2020-05-28
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Publication No.: US11296092B2Publication Date: 2022-04-05
- Inventor: Tse-Yao Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L23/532 ; H01L21/768

Abstract:
The present application discloses a semiconductor device with porous decoupling features and the method for fabricating the semiconductor device with the porous decoupling features. The semiconductor device comprises: a substrate; a first conductive line positioned on the substrate and extend along a first direction; a first conductive line spacer positioned on a sidewall of the first conductive line; a bottom contact positioned adjacent to the first conductive line; a bottom contact spacer positioned on a sidewall of the bottom contact; and a porous insulating layer positioned between the first conductive line spacer and the bottom contact spacer; wherein a porosity of the porous insulating layer is between about 25% and about 100%.
Public/Granted literature
- US20210375881A1 SEMICONDUCTOR DEVICE WITH POROUS DECOUPLING FEATURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-12-02
Information query
IPC分类: