Invention Grant
- Patent Title: PMOS and NMOS contacts in common trench
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Application No.: US16649386Application Date: 2017-12-28
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Publication No.: US11296079B2Publication Date: 2022-04-05
- Inventor: Glenn A. Glass , Anand S. Murthy
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- International Application: PCT/US2017/068661 WO 20171228
- International Announcement: WO2019/132910 WO 20190704
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/205 ; H01L29/423 ; H01L29/78 ; H01L29/786 ; H01L29/45 ; H01L29/40 ; H01L21/8238

Abstract:
Techniques are disclosed for using compositionally different contact materials for p-type and n-type source/drain regions on a common substrate. The different contact materials may be within a common source/drain contact trench, or in type-dedicated trenches. A given contact trench may span one or more fins and include one or more source/drain regions on which a corresponding contact structure is to be made. In an embodiment, an isolation structure between p-type and n-type fins is selective to the trench etch and therefore remains intact within the trench after the target source/drain regions have been exposed. In such cases, the isolation structure physically separates n-type source/drain regions from p-type source/drain regions. The contact structures on the different type source/drain regions may be shorted proximate the top of the isolation structure. Numerous material systems can be used for the channel and source/drain regions, including germanium, group III-V materials, and 2-D materials.
Public/Granted literature
- US20200303373A1 PMOS AND NMOS CONTACTS IN COMMON TRENCH Public/Granted day:2020-09-24
Information query
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