Invention Grant
- Patent Title: High reliability polysilicon components
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Application No.: US16118648Application Date: 2018-08-31
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Publication No.: US11296075B2Publication Date: 2022-04-05
- Inventor: Robert M. Higgins , Henry Litzmann Edwards , Xiaoju Wu , Shariq Arshad , Li Wang , Jonathan Philip Davis , Tathagata Chatterjee
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/06 ; H01L21/8234 ; H01L49/02 ; H01L21/762 ; G06F30/392

Abstract:
The present disclosure introduces, among other things, an electronic device, e.g. an integrated circuit (IC). The IC includes a semiconductor substrate comprising a first doped layer of a first conductivity type. A second doped layer of the first conductivity type is located within the first doped layer. The second doped layer has first and second layer portions with a greater dopant concentration than the first doped layer, with the first layer portion being spaced apart from the second layer portion laterally with respect to a surface of the substrate. The IC further includes a lightly doped portion of the first doped layer, the lightly doped portion being located between the first and second layer portions. A dielectric isolation structure is located between the first and second layer portions, and directly contacts the lightly doped portion.
Public/Granted literature
- US20200075583A1 HIGH RELIABILITY POLYSILICON COMPONENTS Public/Granted day:2020-03-05
Information query
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