Invention Grant
- Patent Title: Method and apparatus for micromachining semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry
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Application No.: US17257328Application Date: 2019-02-28
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Publication No.: US11295953B2Publication Date: 2022-04-05
- Inventor: Hao Zhu , Zhi Zhang , Senshan Mao , Shuaijie Zhu , Zhaoyang Zhang , Kun Xu , Anbin Wang , Douyan Zhao
- Applicant: JIANGSU UNIVERSITY
- Applicant Address: CN Zhenjiang
- Assignee: JIANGSU UNIVERSITY
- Current Assignee: JIANGSU UNIVERSITY
- Current Assignee Address: CN Zhenjiang
- Agency: Bayramoglu Law Offices LLC
- Priority: CN201910137952.0 20190225
- International Application: PCT/CN2019/076416 WO 20190228
- International Announcement: WO2020/172835 WO 20200903
- Main IPC: H01L21/268
- IPC: H01L21/268 ; C23C18/12 ; C23C14/08

Abstract:
An apparatus for micromachining a semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry includes an optical path system, a stable low-pressure jet generation system, and an electrolytic machining system. The optical path system includes a laser generator, a beam expander, a reflector, a galvanometer, and a lens. The electrolytic machining system includes a direct-current pulsed power supply, an adjustable cathode fixture, an electrolyte tank, a current probe, and an oscilloscope. The stable low-pressure jet generation system provides an electrolyte flow into a metal needle. The electrolyte flow forms an electrolyte layer between a semiconductor material and a cathode copper plate, such that the cathode and the anode are in electrical contact with each other. In a method employing the apparatus, a laser beam is irradiated onto the semiconductor material to form a local high-temperature region, which leads to a localized increase in electrical conductivity.
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