Invention Grant
- Patent Title: Electromagnet device, electromagnet controller, electromagnet control method, and electromagnet system
-
Application No.: US15572319Application Date: 2016-05-09
-
Publication No.: US11295935B2Publication Date: 2022-04-05
- Inventor: Tomonori Ohashi , Toshimitsu Barada , Hironobu Yamasaki , Misako Kudo , Ichiju Sato
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2015-096248 20150511,JP2015-108160 20150528,JPJP2015-210872 20151027
- International Application: PCT/JP2016/063698 WO 20160509
- International Announcement: WO2016/181919 WO 20161117
- Main IPC: H01H47/00
- IPC: H01H47/00 ; H01J37/32 ; C23C14/35 ; H01L21/3065 ; C23C14/34 ; G01R19/165 ; H01F7/06 ; H01F7/20 ; H01F13/00 ; H01F27/22
Abstract:
The electromagnet device of the present invention comprises: a yoke having an annular groove in a front surface thereof; an annular coil provided in the groove; and an epoxy resin provided on an outer surface of the coil configured to secure the coil to the yoke, wherein there is a clearance between an outer circumferential surface of the groove in the yoke and the epoxy resin provided on an radially outer side of the coil.
Public/Granted literature
- US20180114678A1 ELECTROMAGNET DEVICE, ELECTROMAGNET CONTROLLER, ELECTROMAGNET CONTROL METHOD, AND ELECTROMAGNET SYSTEM Public/Granted day:2018-04-26
Information query
