Apparatus and method for assessing yield rates of machines in a manufacture system
Abstract:
A yield-rate assessment apparatus for a manufacture system including a plurality of machines, each machine participating in one or more manufacture steps of a batch of products in the manufacture system, performs for each machine: calculating a bad-piece expectation value and a quantity of potential bad pieces at each corresponding manufacture step based on a quantity of bad pieces detected after the last one of the manufacture steps is finished and an initial yield rate of the current machine; calculating a good-piece expectation value based on a quantity of good pieces detected after the last one of the manufacture steps is finished and a summation of all quantities of potential bad pieces calculated for the current machine; and assessing a yield rate according to the good-piece expectation value calculated for the current machine and a summation of the bad-piece expectation value calculated for the current machine at each corresponding step.
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