Invention Grant
- Patent Title: Fluorescence microscopy inspection systems, apparatus and methods with darkfield channel
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Application No.: US16751303Application Date: 2020-01-24
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Publication No.: US11294162B2Publication Date: 2022-04-05
- Inventor: Matthew C. Putman , John B. Putman , Vadim Pinskiy , Denis Sharoukhov
- Applicant: Nanotronics Imaging, Inc.
- Applicant Address: US OH Cuyahoga Falls
- Assignee: Nanotronics Imaging, Inc.
- Current Assignee: Nanotronics Imaging, Inc.
- Current Assignee Address: US OH Cuyahoga Falls
- Agency: DLA Piper LLP (US)
- Main IPC: G02B21/16
- IPC: G02B21/16 ; G02B21/12 ; G02B21/36 ; G06K9/00 ; H04N5/247 ; G02B21/18

Abstract:
A fluorescence microscopy inspection system includes light sources able to emit light that causes a specimen to fluoresce and light that does not cause a specimen to fluoresce. The emitted light is directed through one or more filters and objective channels towards a specimen. A ring of lights projects light at the specimen at an oblique angle through a darkfield channel. One of the filters may modify the light to match a predetermined bandgap energy associated with the specimen and another filter may filter wavelengths of light reflected from the specimen and to a camera. The camera may produce an image from the received light and specimen classification and feature analysis may be performed on the image.
Public/Granted literature
- US20200257100A1 FLUORESCENCE MICROSCOPY INSPECTION SYSTEMS, APPARATUS AND METHODS Public/Granted day:2020-08-13
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