Invention Grant
- Patent Title: Optical test equipment with heating function
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Application No.: US16950324Application Date: 2020-11-17
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Publication No.: US11293973B2Publication Date: 2022-04-05
- Inventor: Wen Pin Chuang , Yi Ching Lo
- Applicant: MPI CORPORATION
- Applicant Address: TW Chu-Pei
- Assignee: MPI CORPORATION
- Current Assignee: MPI CORPORATION
- Current Assignee Address: TW Chu-Pei
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW109136294 20201020
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R31/26

Abstract:
An optical test equipment includes a chuck, a light receiving device corresponding in position to an opening of the chuck, a transparent heating plate disposed on the chuck or light receiving device in a way that the bottom surface of the transparent heating plate faces toward the light receiving device for a wafer to be disposed on the top surface of the transparent heating plate, allowing light to pass through the top and bottom surfaces and being powered to generate heat to heat the wafer, and a probing device including a seat and a probe protruding from the seat toward the top surface of the transparent heating plate for probing a light emitting chip of the wafer. The equipment can perform light emitting efficiency test to the light emitting chip on the wafer before dicing and heat the light emitting chip at the same time.
Public/Granted literature
- US20210156907A1 OPTICAL TEST EQUIPMENT WITH HEATING FUNCTION Public/Granted day:2021-05-27
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