Invention Grant
- Patent Title: Thin-film piezoelectric actuator
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Application No.: US16616213Application Date: 2017-07-15
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Publication No.: US11292255B2Publication Date: 2022-04-05
- Inventor: Wei Xiong , Fei He , Atsushi Iijima
- Applicant: SAE MAGNETICS (H.K.) LTD.
- Applicant Address: CN Hong Kong
- Assignee: SAE MAGNETICS (H.K.) LTD.
- Current Assignee: SAE MAGNETICS (H.K.) LTD.
- Current Assignee Address: CN Hong Kong
- Agency: Nixon & Vanderhye, P.C.
- International Application: PCT/CN2017/093064 WO 20170715
- International Announcement: WO2019/014799 WO 20190124
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/047 ; H01L41/09

Abstract:
A piezoelectric device comprises a pressure chamber forming layer, a vibration plate disposed on and connected with the pressure chamber forming layer to form a pressure chamber, and a piezoelectric element disposed on the vibration plate and used for driving the vibration plate to move and thus changing a volume of the pressure chamber, wherein the piezoelectric element is disposed on the vibration plate in such a manner as to cover a portion of the pressure chamber, the piezoelectric element has two opposite ends respectively extending beyond an edge of the pressure chamber and covering the pressure chamber forming layer. The piezoelectric device of the present invention can efficiently actuate the vibration plate, eliminate undesired displacements of the vibration plate in the opposite direction at the edge of the chamber, and provide higher displacement sensitivity to driving voltage.
Information query
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