Manufacturing method for electronic device
Abstract:
The present invention addresses the problem of providing a manufacturing method for an electronic device that is provided with an organic thin film functioning as a sealing film against moisture permeation in an electronic device such as an organic electroluminescence element. This manufacturing method for an electronic device is a manufacturing method for an electronic device that has at least an organic functional layer, an elution prevention film, and a sealing film in this order, said manufacturing method being characterized by having: a step in which, after coating is performed with a silicone resin, the result is irradiated with vacuum ultraviolet rays to form the elution prevention film; and a step in which, after the elution prevention film is coated with a liquid mixture of a metal alkoxide and a fluoroalcohol, the result is irradiated with vacuum ultraviolet rays to form the ultraviolet rays to form the sealing film.
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