Invention Grant
- Patent Title: Metal landing on top electrode of RRAM
-
Application No.: US16587218Application Date: 2019-09-30
-
Publication No.: US11276819B2Publication Date: 2022-03-15
- Inventor: Chih-Yang Chang , Wen-Ting Chu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00 ; H01L27/24

Abstract:
Some embodiments relate to an integrated circuit including one or more memory cells arranged over a semiconductor substrate between an upper metal interconnect layer and a lower metal interconnect layer. A memory cell includes a bottom electrode disposed over the lower metal interconnect layer, a data storage or dielectric layer disposed over the bottom electrode, and a top electrode disposed over the data storage or dielectric layer. An upper surface of the top electrode is in direct contact with the upper metal interconnect layer without a via or contact coupling the upper surface of the top electrode to the upper metal interconnect layer. Sidewall spacers are arranged along sidewalls of the top electrode, and have bottom surfaces that rest on an upper surface of the data storage or dielectric layer.
Public/Granted literature
- US20200028077A1 METAL LANDING ON TOP ELECTRODE OF RRAM Public/Granted day:2020-01-23
Information query
IPC分类: