Invention Grant
- Patent Title: Silicon carbide semiconductor device and method of manufacturing the same
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Application No.: US16182271Application Date: 2018-11-06
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Publication No.: US11276757B2Publication Date: 2022-03-15
- Inventor: Keiji Okumura
- Applicant: Fuji Electric Co., Ltd.
- Applicant Address: JP Kanagawa
- Assignee: Fuji Electric Co., Ltd.
- Current Assignee: Fuji Electric Co., Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Chen Yoshimura LLP
- Priority: JPJP2017-239762 20171214
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/78 ; H01L29/10 ; H01L21/04 ; H01L29/08 ; H01L29/66 ; H01L29/423

Abstract:
A silicon carbide semiconductor device includes an insulated-gate electrode structure that is formed inside a gate trench that goes through a base region and reaches a upper portion of a current transport layer to control a primary current flowing through the base region; a current suppression layer of the second conductivity type embedded within an upper portion of the current transport layer; a control electrode isolation insulating film filled into a control electrode isolation trench that goes through the base region and reaches an upper portion of the current suppression layer; and a control electrode pad disposed on the control electrode isolation insulating film, wherein an upper portion of the current suppression layer abuts a sidewall of the control electrode isolation insulating film, and a lower portion of the current suppression layer covers at least bottom corners of the control electrode isolation insulating film.
Public/Granted literature
- US20190189756A1 SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-06-20
Information query
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