Invention Grant
- Patent Title: Pattern part, method for forming pattern part and method for manufacturing display device using same
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Application No.: US16662712Application Date: 2019-10-24
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Publication No.: US11276737B2Publication Date: 2022-03-15
- Inventor: Seungcheol Ko , Junho Sim , Seyoon Oh
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2018-0139977 20181114
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L51/00 ; H01L51/52 ; H01L51/50 ; H01L51/56
Abstract:
A method of forming a pattern part includes forming a first film on a target object, the first film having a first cure shrinkage ratio, forming a second film on the first film, the second film having a second cure shrinkage ratio greater than the first cure shrinkage ratio, and patterning the first film and the second film to form a pattern.
Public/Granted literature
- US20200152718A1 PATTERN PART, METHOD FOR FORMING PATTERN PART AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING SAME Public/Granted day:2020-05-14
Information query
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