Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing semiconductor memory device
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Application No.: US16814740Application Date: 2020-03-10
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Publication No.: US11276707B2Publication Date: 2022-03-15
- Inventor: Yuichi Furuki , Hiroki Yamashita
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-159568 20190902
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L23/544 ; H01L27/11526 ; H01L23/522 ; H01L21/66 ; H01L23/528 ; H01L21/768 ; H01L27/11573

Abstract:
According to one embodiment, a semiconductor memory device includes a stacked body disposed in a first tier, the stacked body including a plurality of conductive layers stacked via an insulating layer; a first pillar that extends in the stacked body in a stacking direction of the stacked body; a first upper structure disposed in a second tier upper than the first tier; and a misalignment mark for inspecting misalignment between the first tier and the second tier, wherein the misalignment mark includes a second pillar that extends the first tier of the misalignment inspection region in the stacking direction, and a second upper structure disposed in the second tier of the misalignment inspection region and superposed on the second pillar in a top view.
Public/Granted literature
- US20210066342A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-03-04
Information query
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