Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16559363Application Date: 2019-09-03
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Publication No.: US11276700B2Publication Date: 2022-03-15
- Inventor: Keisuke Nakatsuka
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-052475 20190320
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L23/528 ; H01L21/8229 ; H01L27/11514 ; H01L21/822 ; G11C16/04

Abstract:
A semiconductor memory device includes first conductive layers stacked on a substrate; second conductive layers stacked on the substrate and apart from the first conductive layer in a direction; third conductive layers stacked on the substrate and electrically connected to the first and second conductive layers; first insulating layers arranged in the direction to sandwich the first conductive layers; second insulating layers arranged in the direction to sandwich the second conductive layers; slit regions that sandwich the third conductive layers; and memory pillars disposed on the first and second insulating layers. The slit region is disposed between an end portion of one of the first insulating layers and an end portion of one of the second insulating layers.
Public/Granted literature
- US20200303389A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-09-24
Information query
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