Invention Grant
- Patent Title: Method for forming three-dimensional integrated wiring structure and semiconductor structure thereof
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Application No.: US16996022Application Date: 2020-08-18
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Publication No.: US11276642B2Publication Date: 2022-03-15
- Inventor: Jifeng Zhu , Jun Chen , Si Ping Hu , Zhenyu Lu
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN201710775896.4 20170831
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/76 ; H01L31/036 ; H01L31/112 ; H01L23/528 ; H01L21/02 ; H01L21/768 ; H01L21/683 ; H01L21/3213 ; H01L27/11556 ; H01L27/11582 ; H01L23/522 ; H01L21/3105

Abstract:
Embodiments of methods and structures for forming a 3D integrated wiring structure are disclosed. The method can include forming an insulating layer on a front side of a first substrate; forming a semiconductor layer on a front side of the insulating layer; patterning the semiconductor layer to expose at least a portion of a surface of the insulating layer; forming a plurality of semiconductor structures over the front side of the first substrate, wherein the semiconductor structures include a plurality of conductive contacts and a first conductive layer; joining a second substrate with the semiconductor structures; performing a thinning process on a backside of the first substrate to expose the insulating layer and one end of the plurality of conductive contacts; and forming a conductive wiring layer on the exposed insulating layer.
Public/Granted literature
- US20200381360A1 METHOD FOR FORMING THREE-DIMENSIONAL INTEGRATED WIRING STRUCTURE AND SEMICONDUCTOR STRUCTURE THEREOF Public/Granted day:2020-12-03
Information query
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