Invention Grant
- Patent Title: Load port apparatus, EFEM, and method of installing load port apparatus
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Application No.: US16896319Application Date: 2020-06-09
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Publication No.: US11276599B2Publication Date: 2022-03-15
- Inventor: Tadamasa Iwamoto , Takuya Kudo
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A load port apparatus includes an installation section, a frame section, a first wheel, a second wheel, and a supporter. The installation section includes an installation surface for installing a container for containing a substrate. The frame section is disposed on one side of the installation section, extends upward from this one side, and includes a lower fixation unit located below the installation surface. The first wheel is attached below the installation section and has a first diameter. The second wheel is attached below the installation section and further away from the frame section than the first wheel and has a second diameter smaller than the first diameter. The supporter is attached below the installation section and further away from the frame section than the first wheel and has a vertically adjustable distance from the installation surface to a lower end of the supporter.
Public/Granted literature
- US20210384056A1 LOAD PORT APPARATUS, EFEM, AND METHOD OF INSTALLING LOAD PORT APPARATUS Public/Granted day:2021-12-09
Information query
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