Invention Grant
- Patent Title: Semiconductor structure and method of manufacturing the same
-
Application No.: US16445616Application Date: 2019-06-19
-
Publication No.: US11271094B2Publication Date: 2022-03-08
- Inventor: Chi-Yi Chuang , Ching-Wei Tsai , Kuan-Lun Cheng , Chih-Hao Wang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L29/78 ; H01L29/417

Abstract:
Present disclosure provides a semiconductor structure, including a semiconductor substrate, an insulator fin over the semiconductor substrate, the insulator fin having a principle dimension, from a cross sectional perspective, perpendicular to a top surface of the semiconductor substrate, and a semiconductor capping layer cover the insulator fin along the principle dimension. A method for manufacturing a semiconductor structure is also disclosed in the present disclosure.
Public/Granted literature
- US20200176590A1 SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-06-04
Information query
IPC分类: