Invention Grant
- Patent Title: Interconnect structure with partial sidewall liner
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Application No.: US16890370Application Date: 2020-06-02
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Publication No.: US11270910B2Publication Date: 2022-03-08
- Inventor: Alexander Reznicek , Oscar van der Straten
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Jeffrey S. Labaw
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532 ; H01L23/522

Abstract:
An interconnect structure and techniques for fabrication thereof having a partial sidewall liner are provided. In one aspect, the interconnect structure includes: a substrate; a dielectric disposed on the substrate having at least one feature present therein; a barrier layer lining the at least one feature; a seed enhancement liner disposed over the barrier layer along sidewalls of the at least one feature, wherein the seed enhancement liner is present along only a middle portion of the sidewalls of the at least one feature; and at least one interconnect disposed within the at least one feature over the barrier layer and the seed enhancement liner.
Public/Granted literature
- US20210375671A1 Interconnect Structure with Partial Sidewall Liner Public/Granted day:2021-12-02
Information query
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