Invention Grant
- Patent Title: Semiconductor die structure with air gaps and method for preparing the same
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Application No.: US16855601Application Date: 2020-04-22
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Publication No.: US11270908B2Publication Date: 2022-03-08
- Inventor: Pei-Cheng Fan
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532

Abstract:
The present disclosure provides a semiconductor die structure with air gaps for reducing capacitive coupling between conductive features and a method for preparing the semiconductor die structure. The semiconductor die structure includes a substrate; a first supporting backbone disposed on the substrate; a second supporting backbone disposed on the substrate; a first conductor block disposed on the first supporting backbone; a second conductor block disposed on the second supporting backbone; a third conductor block disposed above the substrate and connected to the first conductor block and the second conductor block; and an air gap structure disposed between the first conductor block, the second conductor block, and the third conductor block, wherein the air gap structure comprises an air gap and a liner layer enclosing the air gap.
Public/Granted literature
- US20210335653A1 SEMICONDUCTOR DIE STRUCTURE WITH AIR GAPS AND METHOD FOR PREPARING THE SAME Public/Granted day:2021-10-28
Information query
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