Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US15634871Application Date: 2017-06-27
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Publication No.: US11270904B2Publication Date: 2022-03-08
- Inventor: Vincent W. Tsang , Charles W. Su
- Applicant: BROOKS AUTOMATION, INC.
- Applicant Address: US MA Chelmsford
- Assignee: BROOKS AUTOMATION, INC.
- Current Assignee: BROOKS AUTOMATION, INC.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H01L21/677 ; B25J9/10 ; B25J9/04 ; B25J9/16

Abstract:
A substrate processing apparatus including a frame, a first SCARA arm having an end effector and being configured to extend and retract along a first axis, a second SCARA arm having an end effector and being configured to extend and retract along a second axis, a drive section including a splitting drive pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second SCARA arms, the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.
Public/Granted literature
- US20180019155A1 SUBSTRATE PROCESSING APPARATUS Public/Granted day:2018-01-18
Information query
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