Invention Grant
- Patent Title: Multilayer batch microfabricated magnetic shielding
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Application No.: US16264979Application Date: 2019-02-01
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Publication No.: US11270892B2Publication Date: 2022-03-08
- Inventor: Robert N. Candler , Jimmy Chen-Yen Wu , Ling Li , Jere C. Harrison
- Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Applicant Address: US CA Oakland
- Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US CA Oakland
- Agency: Foley & Lardner LLP
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L21/768 ; H01L43/12 ; H01L23/552
Abstract:
A microfabrication process includes: (1) etching a shield pattern into a substrate; (2) forming a set of shielding layers on the substrate and in the shield pattern, wherein the shielding layers include n+1 magnetic layers and n spacing layers, n is 0 or an integer that is 1 or greater than 1, and each spacing layer is disposed between a pair of magnetic layers; and (3) planarizing the substrate to expose edges of the shielding layers.
Public/Granted literature
- US20190244831A1 MULTILAYER BATCH MICROFABRICATED MAGNETIC SHIELDING Public/Granted day:2019-08-08
Information query
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