Invention Grant
- Patent Title: Multi-layer protective coating
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Application No.: US16688589Application Date: 2019-11-19
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Publication No.: US11270871B2Publication Date: 2022-03-08
- Inventor: Jian Zong
- Applicant: Jiangsu Favored Nanotechnology Co., LTD
- Applicant Address: CN Wuxi
- Assignee: Jiangsu Favored Nanotechnology Co., LTD
- Current Assignee: Jiangsu Favored Nanotechnology Co., LTD
- Current Assignee Address: CN Wuxi
- Agency: Perkins Coie LLP
- Priority: CN201710360355.5 20170521,CN201710360378.6 20170521,CN201710360379.0 20170521,CN201710360380.3 20170521,CN201710360382.2 20170521,CN201710360383.7 20170521,CN201710361310.X 20170521
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/52 ; C23C16/50 ; C23C16/02

Abstract:
Methods and apparatus for preparing a protective coating are described. In one example aspect, an apparatus for preparing a protective coating includes a chamber, a substrate positioned within the chamber configured to hold at least a target object, an inlet pipe configured to direct a monomer vapor into the chamber, and one or more electrodes configured to perform a chemical vapor deposition process to produce a multi-layer coating. The chemical vapor deposition process comprises multiple cycles, each cycle comprising a pretreatment phase and a coating phase to produce a layer of the multi-layer coating.
Public/Granted literature
- US20200083024A1 MULTI-LAYER PROTECTIVE COATING Public/Granted day:2020-03-12
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