Invention Grant
- Patent Title: Method for improving transmission Kikuchi diffraction pattern
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Application No.: US17114202Application Date: 2020-12-07
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Publication No.: US11270867B2Publication Date: 2022-03-08
- Inventor: Thomas Schwager , Daniel Radu Goran
- Applicant: Bruker Nano GmbH
- Applicant Address: DE Berlin
- Assignee: Bruker Nano GmbH
- Current Assignee: Bruker Nano GmbH
- Current Assignee Address: DE Berlin
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: EP19216196 20191213
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/20 ; G01N23/203

Abstract:
The present invention refers to a method for improving a Transmission Kikuchi Diffraction, TKD pattern, wherein the method comprises the steps of: Detecting a TKD pattern (20b) of a sample (12) in an electron microscope (60) comprising at least one active electron lens (61) focusing an electron beam (80) in z-direction on a sample (12) positioned in distance D below the electron lens (61), the detected TKD (20b) pattern comprising a plurality of image points xD, yD and mapping each of the detected image points xD, yD to an image point of an improved TKD pattern (20a) with the coordinates x0, y0 by using and inverting generalized terms of the form xD=γ*A+(1−γ)*B and yD=γ*C+(1−γ)*D wherein γ = Z D with Z being an extension in the z-direction of a cylindrically symmetric magnetic field BZ of the electron lens (61), and wherein A, B, C, D are trigonometric expressions depending on the coordinates x0, y0, with B and D defining a rotation around a symmetry axis of the magnetic field BZ, and with A and C defining a combined rotation and contraction operation with respect to the symmetry axis of the magnetic field BZ. The invention further relates to a measurement system, computer program and computer-readable medium for carrying out the method of the invention.
Public/Granted literature
- US20210183612A1 METHOD FOR IMPROVING TRANSMISSION KIKUCHI DIFFRACTION PATTERN Public/Granted day:2021-06-17
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