Invention Grant
- Patent Title: Tip-enhanced Raman spectroscope system
-
Application No.: US16583269Application Date: 2019-09-26
-
Publication No.: US11268978B2Publication Date: 2022-03-08
- Inventor: Zhen-Dong Zhu , Si-Tian Gao , Wei Li , Shi Li , Jing-Tao Xu
- Applicant: National Institute of Metrology, China
- Applicant Address: CN Beijing
- Assignee: National Institute of Metrology, China
- Current Assignee: National Institute of Metrology, China
- Current Assignee Address: CN Beijing
- Priority: CN201811161139.9 20180930,CN201811161314.4 20180930,CN201811161514.X 20180930,CN201811162987.1 20180930,CN201811166846.7 20180930
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01Q70/10 ; G01J3/10 ; G01J3/14 ; G01J3/28 ; G01J3/44 ; G01J3/12

Abstract:
The present disclosure provides a tip-enhanced Raman spectroscope system. The system includes a laser emitting unit, a laser excitation unit, a first dichroic beam splitter, a first Raman spectrometer, and a confocal detecting unit. The laser excitation unit includes a sample stage and a first scanning probe. The sample stage is configured to have a sample disposed thereon such that a first incident laser beam emitted from the laser emitting unit is transmitted to the sample to excite first scattered light. The first dichroic beam splitter is configured to split a first Raman scattered light from the first Rayleigh scattered light. The first Raman spectrometer is disposed on a first Raman optical path of the first Raman scattered light. The confocal detecting unit is disposed on a first Rayleigh optical path of the first Rayleigh scattered light to image the sample.
Information query