Invention Grant
- Patent Title: Low pressure fluctuation apparatuses for blending fluids, and methods of using the same
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Application No.: US15518177Application Date: 2015-10-08
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Publication No.: US11266959B2Publication Date: 2022-03-08
- Inventor: Benjamin Patrick Bayer , Laura Suk Chong Chan , Fady Khalil Ereifej , Daniel Valentin Roybal
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: Versum Materials US, LLC
- Current Assignee: Versum Materials US, LLC
- Current Assignee Address: US AZ Tempe
- Agent Daniel A. DeMarah, Jr.
- International Application: PCT/US2015/054698 WO 20151008
- International Announcement: WO2016/057797 WO 20160414
- Main IPC: B01F5/10
- IPC: B01F5/10 ; G05D7/06 ; G05D11/13 ; B01F3/04 ; B01F3/08 ; B01F15/00 ; G01F1/34

Abstract:
A low pressure fluctuation control apparatus comprises a liquid recirculation loop comprising a dip tube, a diaphragm or bellows type pump, a first regulator, a first flow meter, a junction, and a return tube. A back pressure controller is located in the return tube. In addition, the apparatus comprises a material supply line fluidly connected the liquid recirculation loop via the junction. A flow control system is located in the material supply line. The recirculation loop draws liquid from a supply container by the dip tube, and returns a portion of the liquid to the supply container by the return tube. The backpressure flow controller regulates the flow rate of the liquid, thereby steadying fluctuations in the liquid being supplied.
Public/Granted literature
- US20170259226A1 LOW PRESSURE FLUCTUATION FLOW CONTROL APPARATUS AND METHOD Public/Granted day:2017-09-14
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