Invention Grant
- Patent Title: Sensor system for multi-zone electrostatic chuck
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Application No.: US16752491Application Date: 2020-01-24
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Publication No.: US11265971B2Publication Date: 2022-03-01
- Inventor: Vijay D. Parkhe
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H05B1/02
- IPC: H05B1/02 ; H01L21/67 ; H01L21/324 ; H01L21/683 ; G03F7/20 ; H05B3/06 ; H02N13/00
Abstract:
A substrate support assembly comprises a plurality of zones, a chuck comprising a ceramic body, and an additional assembly bonded to a lower surface of the chuck. The additional assembly comprises a second body and a plurality of temperature sensors disposed in or on the second body, wherein each zone of the plurality of zones includes at least one of the plurality of temperature sensors. A plurality of spatially tunable heating elements are disposed a) in or on the ceramic body or b) in or on the second body.
Public/Granted literature
- US20200163159A1 SENSOR SYSTEM FOR MULTI-ZONE ELECTROSTATIC CHUCK Public/Granted day:2020-05-21
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