Invention Grant
- Patent Title: Etching of solar cell materials
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Application No.: US16154416Application Date: 2018-10-08
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Publication No.: US11264518B2Publication Date: 2022-03-01
- Inventor: Douglas H. Rose , Pongsthorn Uralwong , David D. Smith
- Applicant: SunPower Corporation
- Applicant Address: US CA San Jose
- Assignee: SunPower Corporation
- Current Assignee: SunPower Corporation
- Current Assignee Address: US CA San Jose
- Agent Patrick D. Benedicto
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0224 ; H01L31/02

Abstract:
A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without substantially etching a topmost metallic layer comprising tin. For example, an etchant comprising sulfuric acid and hydrogen peroxide may be employed to etch the copper layer selective to the tin layer. A particular example of the aforementioned etchant is a Co-Bra Etch® etchant modified to comprise about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide. In one embodiment, an aluminum layer in the solar cell is etched without substantially etching the tin layer. For example, an etchant comprising potassium hydroxide may be employed to etch the aluminum layer without substantially etching the tin layer.
Public/Granted literature
- US20190044006A1 ETCHING OF SOLAR CELL MATERIALS Public/Granted day:2019-02-07
Information query
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