Invention Grant
- Patent Title: Semiconductor device for improving transistor characteristics during turn-on
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Application No.: US16940407Application Date: 2020-07-28
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Publication No.: US11264491B2Publication Date: 2022-03-01
- Inventor: Daisuke Ozaki , Akinori Kanetake , Tohru Shirakawa , Yosuke Sakurai
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kanagawa
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kanagawa
- Priority: JPJP2018-151662 20180810
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L29/861 ; H01L27/07 ; H01L29/872

Abstract:
Provided is a semiconductor device including a semiconductor substrate provided with a transistor portion, wherein the semiconductor substrate includes, in the transistor portion, a drift region of a first conductivity type; an accumulation region of the first conductivity type that has a higher doping concentration than the drift region; a collector region of a second conductivity type; and a plurality of gate trench portions and a plurality of dummy trench portions that are provided extending in a predetermined extension direction in the top surface of the semiconductor substrate, and are arranged in an arrangement direction orthogonal to the extension direction, and the transistor portion includes a first region that includes a gate trench portion; and a second region in which the number of dummy trench portions arranged in a unit length in the arrangement direction is greater than in the first region.
Information query
IPC分类: