Invention Grant
- Patent Title: Process for producing FET transistors
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Application No.: US14426007Application Date: 2013-09-04
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Publication No.: US11264479B2Publication Date: 2022-03-01
- Inventor: Laurent Grenouillet , Maud Vinet , Romain Wacquez
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1258264 20120905
- International Application: PCT/EP2013/068300 WO 20130904
- International Announcement: WO2014/037411 WO 20140313
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; H01L29/423 ; H01L29/10 ; H01L21/265 ; H01L21/28 ; H01L21/3065 ; H01L29/06 ; H01L29/78

Abstract:
A method of production of a field-effect transistor from a stack of layers forming a semiconductor-on-insulator type substrate, the stack including a superficial layer of an initial thickness, made of a crystalline semiconductor material and covered with a protective layer, the method including: defining, by photolithography, a gate pattern in the protective layer; etching the gate pattern into the superficial layer to leave a thickness of the layer of semiconductor material in place, the thickness defining a height of a conduction channel of the field-effect transistor; forming a gate in the gate pattern; forming, in the superficial layer and on either side of the gate, source and drain zones, while preserving, in the zones, the initial thickness of the superficial layer.
Public/Granted literature
- US20150295066A1 PROCESS FOR PRODUCING FET TRANSISTORS Public/Granted day:2015-10-15
Information query
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