Invention Grant
- Patent Title: Boundary design to reduce memory array edge CMP dishing effect
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Application No.: US16695505Application Date: 2019-11-26
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Publication No.: US11264402B2Publication Date: 2022-03-01
- Inventor: Wei Cheng Wu , Chien-Hung Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L29/06 ; H01L21/76 ; H01L27/11573 ; H01L21/762

Abstract:
In some embodiments, the present disclosure relates to a method of forming an integrated chip. The method includes forming a plurality of memory devices within an embedded memory region of a substrate and forming a plurality of transistor devices within a logic region of the substrate. A first isolation structure is formed within a boundary region of the substrate disposed between the logic region and the embedded memory region. The first isolation structure is formed within a recess in the substrate. A logic wall is formed over the first isolation structure. The logic wall surrounds the embedded memory region and has a first height that is greater than heights of the plurality of memory devices.
Public/Granted literature
- US20200098778A1 BOUNDARY DESIGN TO REDUCE MEMORY ARRAY EDGE CMP DISHING EFFECT Public/Granted day:2020-03-26
Information query
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