Invention Grant
- Patent Title: Multi-type high voltage devices fabrication for embedded memory
-
Application No.: US16666731Application Date: 2019-10-29
-
Publication No.: US11264396B2Publication Date: 2022-03-01
- Inventor: Wei Cheng Wu , Li-Feng Teng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/11517
- IPC: H01L27/11517 ; H01L29/788 ; H01L29/66 ; G11C16/04 ; H01L27/105 ; H01L27/108

Abstract:
Various embodiments of the present application are directed to an IC device and associated forming methods. In some embodiments, a memory region and a logic region are integrated in a substrate. A memory cell structure is disposed on the memory region. A plurality of logic devices disposed on a plurality of logic sub-regions of the logic region. A first logic device is disposed on a first upper surface of a first logic sub-region. A second logic device is disposed on a second upper surface of a second logic sub-region. A third logic device is disposed on a third upper surface of a third logic sub-region. Heights of the first, second, and third upper surfaces of the logic sub-regions monotonically decrease. By arranging logic devices on multiple recessed positions of the substrate, design flexibility is improved and devices with multiple operation voltages are better suited.
Public/Granted literature
- US20200381442A1 MULTI-TYPE HIGH VOLTAGE DEVICES FABRICATION FOR EMBEDDED MEMORY Public/Granted day:2020-12-03
Information query
IPC分类: