Invention Grant
- Patent Title: Semiconductor memory device with air gaps between conductive features and method for preparing the same
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Application No.: US16850427Application Date: 2020-04-16
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Publication No.: US11264390B2Publication Date: 2022-03-01
- Inventor: Chun-Cheng Liao
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L23/532 ; H01L29/49 ; H01L21/762 ; H01L21/768 ; H01L23/528 ; H01L23/522 ; H01L49/02

Abstract:
The present disclosure provides a semiconductor memory device with air gaps between conductive features for reducing capacitive coupling and a method for preparing the semiconductor memory device. The semiconductor memory device includes an isolation layer defining a first active region in a substrate; a first doped region positioned in the first active region; a first word line buried in a first trench adjacent to the first doped region; a high-level bit line contact positioned on the first doped region; a first air gap surrounding the high-level bit line contact; wherein the first word line comprises a lower electrode structure and an upper electrode structure on the lower electrode structure; wherein the upper electrode structure comprises: a source layer substantially covering a sidewall of the first trench; a conductive layer on the source layer; and a work-function adjustment layer disposed between the source layer and the conductive layer.
Public/Granted literature
- US20210327882A1 SEMICONDUCTOR MEMORY DEVICE WITH AIR GAPS BETWEEN CONDUCTIVE FEATURES AND METHOD FOR PREPARING THE SAME Public/Granted day:2021-10-21
Information query
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