Invention Grant
- Patent Title: Conductive barrier direct hybrid bonding
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Application No.: US16383455Application Date: 2019-04-12
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Publication No.: US11264345B2Publication Date: 2022-03-01
- Inventor: Paul M. Enquist
- Applicant: INVENSAS BONDING TECHNOLOGIES, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSAS BONDING TECHNOLOGIES, INC.
- Current Assignee: INVENSAS BONDING TECHNOLOGIES, INC.
- Current Assignee Address: US CA San Jose
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/50 ; H01L25/065 ; H01L25/00

Abstract:
A method for forming a direct hybrid bond and a device resulting from a direct hybrid bond including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, capped by a conductive barrier, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads capped by a second conductive barrier, aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads capped by conductive barriers formed by contact bonding of the first non-metallic region to the second non-metallic region.
Public/Granted literature
- US20190237419A1 CONDUCTIVE BARRIER DIRECT HYBRID BONDING Public/Granted day:2019-08-01
Information query
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