- Patent Title: Semiconductor device with cut metal gate and method of manufacture
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Application No.: US16787625Application Date: 2020-02-11
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Publication No.: US11264287B2Publication Date: 2022-03-01
- Inventor: Yi-Chun Chen , Ryan Chia-Jen Chen , Shu-Yuan Ku , Ya-Yi Tsai , I-Wei Yang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092

Abstract:
An anchored cut-metal gate (CMG) plug, a semiconductor device including the anchored CMG plug and methods of forming the semiconductor device are disclosed herein. The method includes performing a series of etching processes to form a trench through a metal gate electrode, through an isolation region, and into a semiconductor substrate. The trench cuts-through and separates the metal gate electrode into a first metal gate and a second metal gate and forms a recess in the semiconductor substrate. Once the trench has been formed, a dielectric plug material is deposited into the trench to form a CMG plug that is anchored within the recess of the semiconductor substrate and separates the first and second metal gates. As such, the anchored CMG plug provides high levels of resistance to reduce leakage current within the semiconductor device during operation and allowing for improved V-trigger performance of the semiconductor device.
Public/Granted literature
- US20210249313A1 SEMICONDUCTOR DEVICE WITH CUT METAL GATE AND METHOD OF MANUFACTURE Public/Granted day:2021-08-12
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