Invention Grant
- Patent Title: Interconnect integration scheme with fully self-aligned vias
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Application No.: US16659734Application Date: 2019-10-22
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Publication No.: US11264276B2Publication Date: 2022-03-01
- Inventor: Shyng-Tsong Chen , Terry A. Spooner
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/528 ; H01L23/522

Abstract:
A method is presented for forming self-aligned vias by employing a top level line pattern. The method includes forming first conductive lines within a first dielectric material, recessing one conductive line of the conductive lines to define a first opening, filling the first opening with a second dielectric material, and forming a sacrificial block perpendicular to and in direct contact with a non-recessed first conductive line. The method further includes forming a single via directly underneath the sacrificial block by recessing the non-recessed first conductive line, removing the sacrificial block to define a second opening, and filling the second opening with a conductive material to define a second conductive line such that the single via aligns to both the non-recessed first conductive line and the second conductive line.
Public/Granted literature
- US20210118733A1 INTERCONNECT INTEGRATION SCHEME WITH FULLY SELF-ALIGNED VIAS Public/Granted day:2021-04-22
Information query
IPC分类: