Invention Grant
- Patent Title: Modifiable magnet configuration for arc vaporization sources
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Application No.: US13148384Application Date: 2009-12-30
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Publication No.: US11264216B2Publication Date: 2022-03-01
- Inventor: Siegfried Krassnitzer , Juerg Hagmann , Oliver Gstoehl
- Applicant: Siegfried Krassnitzer , Juerg Hagmann , Oliver Gstoehl
- Applicant Address: AT Feldkirch; CH Sax; LI Balzers
- Assignee: Siegfried Krassnitzer,Juerg Hagmann,Oliver Gstoehl
- Current Assignee: Siegfried Krassnitzer,Juerg Hagmann,Oliver Gstoehl
- Current Assignee Address: AT Feldkirch; CH Sax; LI Balzers
- Agency: Pearne & Gordon LLP
- Priority: DE102009008161.5 20090209
- International Application: PCT/EP2009/009319 WO 20091230
- International Announcement: WO2010/088947 WO 20100812
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/34 ; C23C14/32

Abstract:
The present invention relates to an arc vaporization source for generating hard surface coatings on tools. The invention comprises an arc-vaporization source, comprising at least one electric solenoid and a permanent magnet arrangement that is displaceable relative to the target surface. The vaporization source can be adjusted to the different requirements of oxide, nitride, or metal coatings. The rate drop during the lifespan of a target to be vaporized can be held constant or adjusted by suitably adjusting the distance of the permanent magnets to the front side of the target. A compromise between the coating roughness and rate can be set.
Public/Granted literature
- US20110308941A1 MODIFIABLE MAGNET CONFIGURATION FOR ARC VAPORIZATION SOURCES Public/Granted day:2011-12-22
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