- Patent Title: Application of modulating supplies in a plasma processing system
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Application No.: US17031027Application Date: 2020-09-24
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Publication No.: US11264209B2Publication Date: 2022-03-01
- Inventor: Gideon Van Zyl , Kevin Fairbairn , Denis Shaw
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Plasma processing systems and methods are disclosed. The system may include at least one modulating supply that modulates plasma properties where the modulation of the plasma properties has a repetition period, T. A synchronization module configured to send a synchronization signal with a synchronization-signal-repetition-period that is an integer multiple of T to at least one piece of equipment connected to the plasma processing system. A waveform-communication module communicates characteristics of a characterized waveform to at least one piece of equipment connected to the plasma system to enable synchronization of pieces of equipment connected to the plasma processing system. The characterized waveform may contain information about the modulation of the plasma or information about a desired waveform of a piece of equipment connected to the plasma processing system.
Public/Granted literature
- US20210074513A1 APPLICATION OF MODULATING SUPPLIES IN A PLASMA PROCESSING SYSTEM Public/Granted day:2021-03-11
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