Invention Grant
- Patent Title: Alert device and alert method thereof
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Application No.: US16932399Application Date: 2020-07-17
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Publication No.: US11263755B2Publication Date: 2022-03-01
- Inventor: Shyue-Ru Doong , Feng-Ju Tsai
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/13 ; G06T7/00 ; H01L21/67

Abstract:
The present disclosure provides an alert device and an alert method. The alert device includes an image capturing unit, an input/output unit and a processing unit. The image capturing unit is configured to capture at least one image of a wafer transportation system. The processing unit is configured to: retrieve the at least one image from the image capturing unit; define a first boundary in the at least one image; identify a wafer chuck of the wafer transportation system in the at least one image; determine whether the wafer chuck intersects the first boundary in the at least one image; and transmit an alert signal to the wafer transportation system via the input/output unit when the wafer chuck is determined to intersect the first boundary in the at least one image.
Public/Granted literature
- US20220020157A1 ALERT DEVICE AND ALERT METHOD THEREOF Public/Granted day:2022-01-20
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