Invention Grant
- Patent Title: Substrate processing apparatus and substrate processing method
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Application No.: US16885899Application Date: 2020-05-28
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Publication No.: US11260436B2Publication Date: 2022-03-01
- Inventor: Naoyuki Osada , Takahiro Yamaguchi , Eri Fujita , Akihisa Iwasaki , Ayumi Higuchi , Shota Iwahata
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JPJP2017-031485 20170222,JPJP2017-207355 20171026
- Main IPC: B08B17/02
- IPC: B08B17/02 ; B08B3/08 ; B08B3/10 ; H01L21/67 ; B08B3/04

Abstract:
The substrate processing apparatus includes common piping which guides a processing liquid to a branching portion, supply piping which guides the processing liquid from the branching portion to a chemical liquid nozzle, return piping which guides the processing liquid from the branching portion, and a discharge valve which changes a flow rate of the processing liquid supplied from the common piping to the branching portion. The discharge valve makes a valve element stationary at a plurality of positions including a discharge execution position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate larger than a maximum value of a suction flow rate and a discharge stop position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate smaller than the maximum value of the suction flow rate.
Public/Granted literature
- US20200290101A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Public/Granted day:2020-09-17
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