- Patent Title: Resistance random access memory and method for fabricating the same
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Application No.: US16616785Application Date: 2017-05-26
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Publication No.: US11245074B2Publication Date: 2022-02-08
- Inventor: Hangbing Lv , Ming Liu , Shibing Long , Qi Liu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- International Application: PCT/CN2017/086084 WO 20170526
- International Announcement: WO2018/214142 WO 20181129
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A RRAM and a method for fabricating the same, wherein the RRAM comprises: a bottom electrode; an oxide layer containing a bottom electrode metal, disposed on the bottom electrode; a resistance-switching layer, disposed on the oxide layer containing a bottom electrode metal, wherein the resistance-switching layer material is a nitrogen-containing tantalum oxide; an inserting layer, disposed on the resistance-switching layer, wherein the inserting layer material comprises a metal or a semiconductor; a top electrode, disposed on the inserting layer. By providing the to resistance-switching layer with a nitrogen-containing tantalum oxide, compared with Ta2O5, the RRAM of the present disclosure has a low activation voltage and a high on-off ratio, and can enhance the control capability over the device resistance by the number of oxygen vacancies.
Public/Granted literature
- US20210175420A1 RESISTANCE RANDOM ACCESS MEMORY AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-06-10
Information query
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