Invention Grant
- Patent Title: Memory cell, method of forming the same, and semiconductor device having the same
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Application No.: US16737886Application Date: 2020-01-08
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Publication No.: US11245071B2Publication Date: 2022-02-08
- Inventor: Yu-Chao Lin , Carlos H. Diaz , Shao-Ming Yu , Tung-Ying Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/11519 ; H01L27/22 ; H01L27/24

Abstract:
Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.
Information query
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