Invention Grant
- Patent Title: Semiconductor device, inverter circuit, drive device, vehicle, and elevator
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Application No.: US16791576Application Date: 2020-02-14
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Publication No.: US11245017B2Publication Date: 2022-02-08
- Inventor: Shinya Kyogoku , Johji Nishio , Ryosuke Iijima
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-143400 20190802
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/16 ; H01L29/78 ; H01L29/10 ; H01L29/06

Abstract:
A semiconductor device of an embodiment includes a first electrode, a second electrode, a silicon carbide layer between the first electrode and the second electrode, and the silicon carbide layer having a first plane and a second plane, the silicon carbide layer including a first trench, p-type first silicon carbide regions and n-type second silicon carbide regions alternately disposed, a p-type third silicon carbide region between the second silicon carbide region and the first plane, and an n-type fourth silicon carbide region between the third silicon carbide region and the first plane, and a p-type fifth silicon carbide region between the first silicon carbide region and the first trench, a gate electrode in the first trench, and a gate insulating layer. The length of the first silicon carbide region perpendicular to the first plane is longer than a depth of the first trench.
Public/Granted literature
- US20210036116A1 SEMICONDUCTOR DEVICE, INVERTER CIRCUIT, DRIVE DEVICE, VEHICLE, AND ELEVATOR Public/Granted day:2021-02-04
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